Inventor
KAMEI MITSUHIRO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KAMEI MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
9 patentsUS5116482AMay 26, 1992
Film forming system using high frequency power and power supply unit for the same
HITACHI LTD88 citations95
US5429729AJul 4, 1995
Sputtering apparatus, device for exchanging target and method for the same
HITACHI LTD25 citations92
US4986890AJan 22, 1991
Thin film deposition system
HITACHI LTD40 citations92
US4865709ASep 12, 1989
Magnetron sputter apparatus and method for forming films by using the same apparatus
HITACHI LTD38 citations92
US5999236ADec 7, 1999
Active-matrix liquid crystal display unit in which gate and/or data lines are made of Cr containing Ne-atoms
HITACHI LTD24 citations91
US5783055AJul 21, 1998
Multi-chamber sputtering apparatus
HITACHI LTD17 citations82
US5085755AFeb 4, 1992
Sputtering apparatus for forming thin films
HITACHI LTD16 citations72
US4911815AMar 27, 1990
Sputtering apparatus for production of thin films of magnetic materials
HITACHI LTD16 citations70
US5376777ADec 27, 1994
Control apparatus and method for a substrate tray on an in-line sputtering apparatus
HITACHI LTD3 citations62