Inventor

ANDEEN DAVID G

US3 patents

Patents

3 patents

US6516816B1Feb 11, 2003

Spin-rinse-dryer

APPLIED MATERIALS INC21 citations91

US6558471B2May 6, 2003

Scrubber operation

APPLIED MATERIALS INC10 citations71

US7226514B2Jun 5, 2007

Spin-rinse-dryer

APPLIED MATERIALS INC1 citations51