Inventor

ESCUDERO-SANZ ISABEL

NL3 patents

⚠️ This page may combine multiple inventors who share the name “ESCUDERO-SANZ ISABEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7583433B2Sep 1, 2009

Multi mirror system for an illumination system

ZEISS CARL SMT AG13 citations92

US6840640B2Jan 11, 2005

Multi mirror system for an illumination system

ZEISS CARL SMT AG18 citations92

ASML NETHERLANDS BV

1 patent

US6498351B1Dec 24, 2002

Illumination system for shaping extreme ultraviolet radiation used in a lithographic projection apparatus

ASML NETHERLANDS BV63 citations93