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Inventor
KOZLOWSKI PAUL M
US
3 patents
⚠️ This page may combine multiple inventors who share the name “KOZLOWSKI PAUL M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
2 patents
US6350321B1
Feb 26, 2002
UHV horizontal hot wall cluster CVD/growth design
IBM
28 citations
88
US7078300B2
Jul 18, 2006
Thin germanium oxynitride gate dielectric for germanium-based devices
IBM
7 citations
72
TOBAIL OSAMA
1 patent
US8828504B2
Sep 9, 2014
Deposition of hydrogenated thin film
TOBAIL OSAMA
0 citations
30