Inventor
FRUHBERGER BERND
US6 patents
Patents
6 patentsUS7340941B1Mar 11, 2008
Dense thin film-based chemical sensors and methods for making and using same
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US6977511B2Dec 20, 2005
Sensor and sensor array having improved selectivity
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US6864692B1Mar 8, 2005
Sensor having improved selectivity
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US7115969B1Oct 3, 2006
Fixed parallel plate MEMS capacitor microsensor and microsensor array and method of making same
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US7489017B2Feb 10, 2009
Fixed parallel plate MEMS capacitor microsensor array
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US7393740B2Jul 1, 2008
Methods for making fixed parallel plate MEMS capacitor microsensors and microsensor arrays
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