Inventor
SUGIMOTO HIROYA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SUGIMOTO HIROYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
5 patentsUSD609655SFeb 9, 2010
Electrostatic chuck
NGK INSULATORS LTD596 citations96
US7250215B2Jul 31, 2007
Aluminum nitride sintered body containing carbon fibers and method of manufacturing the same
NGK INSULATORS LTD8 citations73
US9255747B2Feb 9, 2016
Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus
NGK INSULATORS LTD2 citations61
US9257315B2Feb 9, 2016
Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus
NGK INSULATORS LTD2 citations61
US8361271B2Jan 29, 2013
Ceramic-metal bonded body and method of producing the same
NGK INSULATORS LTD4 citations58