Inventor
KUWABARA YOSHINORI
JP6 patents
Patents
6 patentsUS6580196B1Jun 17, 2003
Piezoelectric single crystal wafer
SHINETSU CHEMICAL CO8 citations71
US5610401AMar 11, 1997
Radiant ray-detector and method for producing same
SHINETSU CHEMICAL CO8 citations71
US11057014B2Jul 6, 2021
Bonded substrate and a manufacturing method thereof, and a surface acoustic wave device using the said bonded substrate
SHINETSU CHEMICAL CO0 citations61
US11021810B2Jun 1, 2021
Lithium tantalate single crystal substrate, bonded substrate, manufacturing method of the bonded substrate, and surface acoustic wave device using the bonded substrate
SHINETSU CHEMICAL CO0 citations61
US10418543B2Sep 17, 2019
Method of manufacturing an oxide single crystal substrate for a surface acoustic wave device
SHINETSU CHEMICAL CO0 citations40
US10707829B2Jul 7, 2020
Lithium tantalate single crystal substrate for a surface acoustic wave device and a device using the same, and a manufacturing method thereof and an inspection method thereof
SHINETSU CHEMICAL CO0 citations39