Inventor

ALVI MOHAMMED HAROON

US2 patents

Patents

2 patents

US12278125B2Apr 15, 2025

Integrated dry processes for patterning radiation photoresist patterning

LAM RES CORP8 citations85

US12183604B2Dec 31, 2024

Integrated dry processes for patterning radiation photoresist patterning

LAM RES CORP9 citations84