Inventor

FUKUYAMA RYOJI

JP3 patents

Patents

3 patents

US6506686B2Jan 14, 2003

Plasma processing apparatus and plasma processing method

HITACHI LTD52 citations95

US4631106ADec 23, 1986

Plasma processor

HITACHI LTD99 citations94

US4618398AOct 21, 1986

Dry etching method

HITACHI LTD36 citations91