Inventor
EPHRATH LINDA M
US4 patents
Patents
4 patentsUS4473598ASep 25, 1984
Method of filling trenches with silicon and structures
IBM74 citations95
US4675072AJun 23, 1987
Trench etch endpoint detection by LIF
IBM74 citations94
US4283249AAug 11, 1981
Reactive ion etching
IBM55 citations93
US4426274AJan 17, 1984
Reactive ion etching apparatus with interlaced perforated anode
IBM15 citations70