Inventor

CROCKATT DALE M

US3 patents

⚠️ This page may combine multiple inventors who share the name “CROCKATT DALE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US4931379AJun 5, 1990

High sensitivity resists having autodecomposition temperatures greater than about 160° C.

IBM30 citations91

US5023164AJun 11, 1991

Highly sensitive dry developable deep UV photoresist

IBM26 citations90

BRUNSVOLD WILLIAM R

1 patent

US4939070AJul 3, 1990

Thermally stable photoresists with high sensitivity

BRUNSVOLD WILLIAM R86 citations92