Inventor

FURUKAWAHARA KAZUNORI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “FURUKAWAHARA KAZUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM JAPAN

2 patents

US7833353B2Nov 16, 2010

Liquid material vaporization apparatus for semiconductor processing apparatus

ASM JAPAN562 citations97

US7712370B2May 11, 2010

Method of detecting occurrence of sticking of substrate

ASM JAPAN2 citations54

ASM IP HOLDING BV

1 patent

US9349620B2May 24, 2016

Apparatus and method for pre-baking substrate upstream of process chamber

ASM IP HOLDING BV472 citations96