Inventor
ZHAO MENGXIN
CN10 patents
⚠️ This page may combine multiple inventors who share the name “ZHAO MENGXIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD
8 patentsUS10622224B2Apr 14, 2020
Precleaning chamber and plasma processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD4 citations70
US10347470B2Jul 9, 2019
Process chamber and semiconductor processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD4 citations70
US11282735B2Mar 22, 2022
Electrostatic chuck and semiconductor equipment
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations66
US11328940B2May 10, 2022
Degassing chamber and semiconductor processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations61
US11107665B2Aug 31, 2021
Feeding structure, upper electrode assembly, and physical vapor deposition chamber and device
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations56
US12252776B2Mar 18, 2025
Carrying device and semiconductor processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations51
US11282682B2Mar 22, 2022
Magnetron drive mechanism, magnetron assembly and reaction chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations46
US10273572B2Apr 30, 2019
Heating chamber and semiconductor processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations39