Inventor
HAGEN KENNETH N
US7 patents
Patents
7 patentsUS6303492B1Oct 16, 2001
Expanded implantation of contact holes
MICRON TECHNOLOGY INC19 citations92
US9768134B2Sep 19, 2017
Methods of forming conductive materials on semiconductor devices, and methods of forming electrical interconnects
MICRON TECHNOLOGY INC5 citations82
US6110789AAug 29, 2000
Contact formation using two anneal steps
MICRON TECHNOLOGY INC15 citations73
US10276529B2Apr 30, 2019
Semiconductor devices including conductive pillars
MICRON TECHNOLOGY INC2 citations71
US6667554B2Dec 23, 2003
Expanded implantation of contact holes
MICRON TECHNOLOGY INC1 citations62
US10777523B2Sep 15, 2020
Semiconductor devices and semiconductor devices including a redistribution layer
MICRON TECHNOLOGY INC0 citations51
US6632727B2Oct 14, 2003
Expanded implantation of contact holes
MICRON TECHNOLOGY INC0 citations51