Inventor
HOSODA Hirokazu
JP14 patents
Patents
14 patentsUS10271414B2Apr 23, 2019
Droplet detector and extreme ultraviolet light generating apparatus
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US10172224B2Jan 1, 2019
Extreme UV light generator
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US10141186B2Nov 27, 2018
Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system
GIGAPHOTON INC2 citations72
US10057972B2Aug 21, 2018
Extreme ultraviolet light generation system and method of generating extreme ultraviolet light
GIGAPHOTON INC5 citations72
US10976664B2Apr 13, 2021
Target image capturing device and extreme ultraviolet light generation device
GIGAPHOTON INC2 citations71
US10420198B2Sep 17, 2019
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC1 citations62
US11333981B2May 17, 2022
Target image capturing device and extreme ultraviolet light generation apparatus
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US12284745B2Apr 22, 2025
Extreme ultraviolet light generation method, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations57
US11366390B2Jun 21, 2022
Extreme ultraviolet light generation system and electronic device manufacturing method
GIGAPHOTON INC1 citations56
US9860967B2Jan 2, 2018
Target supply apparatus, extreme ultraviolet light generating apparatus, and target supply method
GIGAPHOTON INC0 citations51
US11337293B2May 17, 2022
Extreme ultraviolet light generation system and electronic device manufacturing method
GIGAPHOTON INC0 citations43
US10126657B2Nov 13, 2018
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC0 citations41
US9942973B2Apr 10, 2018
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC0 citations41
US10209625B2Feb 19, 2019
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC0 citations39