P

Inventor

MUELLER BRIAN L

US35 patents
⚠️ This page may combine multiple inventors who share the name “MUELLER BRIAN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CABOT MICROELECTRONICS CORP

15 patents
US6177026B1Jan 23, 2001

CMP slurry containing a solid catalyst

CABOT MICROELECTRONICS CORP111 citations98
US6293848B1Sep 25, 2001

Composition and method for planarizing surfaces

CABOT MICROELECTRONICS CORP86 citations97
US6435947B2Aug 20, 2002

CMP polishing pad including a solid catalyst

CABOT MICROELECTRONICS CORP55 citations96
US6383065B1May 7, 2002

Catalytic reactive pad for metal CMP

CABOT MICROELECTRONICS CORP51 citations96
US6689692B1Feb 10, 2004

Composition for oxide CMP

CABOT MICROELECTRONICS CORP56 citations95
US6362104B1Mar 26, 2002

Method for polishing a substrate using a CMP slurry

CABOT MICROELECTRONICS CORP42 citations93
US6984588B2Jan 10, 2006

Compositions for oxide CMP

CABOT MICROELECTRONICS CORP21 citations92
US6527817B1Mar 4, 2003

Composition and method for planarizing surfaces

CABOT MICROELECTRONICS CORP25 citations92
US6533832B2Mar 18, 2003

Chemical mechanical polishing slurry and method for using same

CABOT MICROELECTRONICS CORP48 citations91
US6726534B1Apr 27, 2004

Preequilibrium polishing method and system

CABOT MICROELECTRONICS CORP39 citations89
US6350393B2Feb 26, 2002

Use of CsOH in a dielectric CMP slurry

CABOT MICROELECTRONICS CORP16 citations80
US6716755B2Apr 6, 2004

Composition and method for planarizing surfaces

CABOT MICROELECTRONICS CORP11 citations73
US6612911B2Sep 2, 2003

Alkali metal-containing polishing system and method

CABOT MICROELECTRONICS CORP11 citations71
US7238618B2Jul 3, 2007

System for the preferential removal of silicon oxide

CABOT MICROELECTRONICS CORP9 citations70
US7365013B2Apr 29, 2008

System for the preferential removal of silicon oxide

CABOT MICROELECTRONICS CORP0 citations48

CABOT CORP

8 patents

SPEEDFAM IPEC CORP

3 patents

ECOLAB USA INC

3 patents

UNIV MICHIGAN

2 patents

ROHM & HAAS ELECT MAT

2 patents

HENKEL CORP

1 patent

EMESH ISMAIL

1 patent