Inventor
KOSHIMIZU TAKANOBU
JP3 patents
Patents
3 patentsUS6730595B2May 4, 2004
Protecting method for semiconductor wafer and surface protecting adhesive film for semiconductor wafer used in said method
MITSUI CHEMICALS INC24 citations91
US6879026B2Apr 12, 2005
Surface protecting adhesive film for semiconductor wafer and processing method for semiconductor wafer using said adhesive film
MITSUI CHEMICALS INC13 citations81
US7501312B2Mar 10, 2009
Method of protecting semiconductor wafer and adhesive film for protection of semiconductor wafer
MITSUI CHEMICALS INC1 citations48