P

Inventor

BAI SHUFENG

US5 patents
⚠️ This page may combine multiple inventors who share the name “BAI SHUFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents
US9494874B2Nov 15, 2016

Method and apparatus for design of a metrology target

ASML NETHERLANDS BV5 citations70
US10007744B2Jun 26, 2018

Process based metrology target design

ASML NETHERLANDS BV2 citations68
US10296681B2May 21, 2019

Process based metrology target design

ASML NETHERLANDS BV1 citations58

UNIV PRINCETON

1 patent
US7317739B2Jan 8, 2008

Mode-locked laser using a mode-locking wavelength selective reflector

UNIV PRINCETON9 citations81

CHOU STEPHEN Y

1 patent
US8192669B2Jun 5, 2012

Methods for fabricating large area nanoimprint molds

CHOU STEPHEN Y0 citations49