Inventor
KOMASAKI MASAHITO
JP11 patents
Patents
11 patentsUS6346038B1Feb 12, 2002
Wafer loading/unloading device and method for producing wafers
MITSUBISHI MATERIALS CORP23 citations87
US6280306B1Aug 28, 2001
Wafer polishing apparatus and wafer manufacturing method
MITSUBISHI MATERIALS CORP18 citations80
US6302772B1Oct 16, 2001
Apparatus and method for dressing a wafer polishing pad
MITSUBISHI MATERIALS CORP12 citations69
US10420223B2Sep 17, 2019
Method for manufacturing substrate for power module with heat sink
MITSUBISHI MATERIALS CORP2 citations68
US11404622B2Aug 2, 2022
Insulated heat transfer substrate, thermoelectric conversion module, and method for manufacturing insulated heat transfer substrate
MITSUBISHI MATERIALS CORP0 citations61
US10121574B2Nov 6, 2018
Resistor and method for manufacturing resistor
MITSUBISHI MATERIALS CORP0 citations51
US11538974B2Dec 27, 2022
Magnesium-based thermoelectric conversion material, magnesium-based thermoelectric conversion element, thermoelectric conversion device, and method for manufacturing magnesium-based thermoelectric conversion material
MITSUBISHI MATERIALS CORP0 citations49
US11380832B2Jul 5, 2022
Thermoelectric conversion module and method for producing thermoelectric conversion module
MITSUBISHI MATERIALS CORP0 citations49
US10806028B2Oct 13, 2020
Method for manufacturing ceramic-metal layer assembly, method for manufacturing ceramic circuit board, and metal-board-joined ceramic base material board
MITSUBISHI MATERIALS CORP0 citations48
US10510939B2Dec 17, 2019
Thermoelectric conversion cell and thermoelectric conversion module
MITSUBISHI MATERIALS CORP0 citations48
US10573798B2Feb 25, 2020
Thermoelectric conversion module and thermoelectric conversion device
MITSUBISHI MATERIALS CORP0 citations41