Inventor

KOYA SHIGEO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KOYA SHIGEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

4 patents

US10509335B2Dec 17, 2019

Cover member, conveying apparatus, lithography apparatus, and method of manufacturing article

CANON KK1 citations59

US12469737B2Nov 11, 2025

Stage apparatus, lithography apparatus and article manufacturing method

CANON KK0 citations48

US10185233B2Jan 22, 2019

Cover member, conveying apparatus, lithography apparatus, and method of manufacturing article

CANON KK0 citations48

US9104108B2Aug 11, 2015

Holder, lithography apparatus, and method of manufacturing article

CANON KK1 citations45

KOYA SHIGEO

1 patent

US8766215B2Jul 1, 2014

Charged particle beam drawing apparatus and method of manufacturing article

KOYA SHIGEO1 citations39