Inventor
YOON ILYOUNG
KR14 patents
Patents
14 patentsUS9006067B2Apr 14, 2015
Semiconductor device and method of fabricationg the same
SAMSUNG ELECTRONICS CO LTD7 citations83
US7452817B2Nov 18, 2008
CMP method providing reduced thickness variations
SAMSUNG ELECTRONICS CO LTD18 citations80
US10535533B2Jan 14, 2020
Semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations66
US12207457B2Jan 21, 2025
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US11910594B2Feb 20, 2024
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US11411004B2Aug 9, 2022
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US12485515B2Dec 2, 2025
Slurry arm and chemical mechanical polishing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US12328870B2Jun 10, 2025
Semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations51
US12501685B2Dec 16, 2025
Semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations50
US12490424B2Dec 2, 2025
Semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations47
US12400907B2Aug 26, 2025
Semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations46
US11765880B2Sep 19, 2023
Method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations45
US12464795B2Nov 4, 2025
Method of manufacturing semiconductor device using single slurry chemical mechanical polishing (CMP) process
SAMSUNG ELECTRONICS CO LTD0 citations44
US11757015B2Sep 12, 2023
Semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations42