Inventor
FUKUDOME TAKAYUKI
JP3 patents
Patents
3 patentsUS11476136B2Oct 18, 2022
Substrate processing apparatus and method of adjusting substrate processing apparatus
TOKYO ELECTRON LTD0 citations57
US10886151B2Jan 5, 2021
Heating apparatus and substrate processing apparatus
TOKYO ELECTRON LTD1 citations55
US10504757B2Dec 10, 2019
Substrate processing apparatus and method of adjusting substrate processing apparatus
TOKYO ELECTRON LTD0 citations47