Inventor
TATESHITA KOICHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “TATESHITA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7338576B2Mar 4, 2008
Plasma processing device
TOKYO ELECTRON LTD41 citations92
US10950418B2Mar 16, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations68
US10950415B2Mar 16, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations47