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Inventor
SCHEIBLE KATHLEEN
US
3 patents
⚠️ This page may combine multiple inventors who share the name “SCHEIBLE KATHLEEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US10347475B2
Jul 9, 2019
Holding assembly for substrate processing chamber
APPLIED MATERIALS INC
7 citations
79
US11658016B2
May 23, 2023
Shield for a substrate processing chamber
APPLIED MATERIALS INC
2 citations
68
SCHEIBLE KATHLEEN
1 patent
US9127362B2
Sep 8, 2015
Process kit and target for substrate processing chamber
SCHEIBLE KATHLEEN
376 citations
94