P

Inventor

FLANIGAN MICHAEL ALLEN

US5 patents
⚠️ This page may combine multiple inventors who share the name “FLANIGAN MICHAEL ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US8021527B2Sep 20, 2011

Coaxial shafts for radial positioning of rotating magnetron

APPLIED MATERIALS INC11 citations83
US10347475B2Jul 9, 2019

Holding assembly for substrate processing chamber

APPLIED MATERIALS INC7 citations79
US11658016B2May 23, 2023

Shield for a substrate processing chamber

APPLIED MATERIALS INC2 citations68

SCHEIBLE KATHLEEN

1 patent
US9127362B2Sep 8, 2015

Process kit and target for substrate processing chamber

SCHEIBLE KATHLEEN376 citations94

MILLER KEITH A

1 patent
US8900427B2Dec 2, 2014

Homing device for magnetron rotating on two arms

MILLER KEITH A0 citations50