Inventor
MCFADDEN ANGUS
US6 patents
Patents
6 patentsUS12359306B2Jul 15, 2025
Deposition processing systems having active temperature control and associated methods
TECHNETICS GROUP LLC0 citations59
US11332821B2May 17, 2022
Deposition processing systems having active temperature control and associated methods
TECHNETICS GROUP LLC0 citations59
US10596503B1Mar 24, 2020
Metal seal with an integral filter
TECHNETICS GROUP LLC1 citations53
US11673161B2Jun 13, 2023
Methods of manufacturing electrostatic chucks
TECHNETICS GROUP LLC0 citations48
US10727195B2Jul 28, 2020
Bond materials with enhanced plasma resistant characteristics and associated methods
TECHNETICS GROUP LLC0 citations48
US11718905B2Aug 8, 2023
Functionally integrated coating structures
TECHNETICS GROUP LLC0 citations42