Inventor
CHU YIN SHEN
TW4 patents
Patents
4 patentsUS6972258B2Dec 6, 2005
Method for selectively controlling damascene CD bias
TAIWAN SEMICONDUCTOR MFG19 citations82
US6777334B2Aug 17, 2004
Method for protecting a wafer backside from etching damage
TAIWAN SEMICONDUCTOR MFG14 citations78
US7820553B2Oct 26, 2010
Prevention of trench photoresist scum
TAIWAN SEMICONDUCTOR MFG8 citations74
US6884728B2Apr 26, 2005
Method for removing polymeric residue contamination on semiconductor feature sidewalls
TAIWAN SEMICONDUCTOR MFG4 citations59