Inventor

SLATER SIDNEY GEORGE

US2 patents

Patents

2 patents

US6610808B2Aug 26, 2003

Thermally cured underlayer for lithographic application

ARCH SPEC CHEM INC28 citations90

US6924339B2Aug 2, 2005

Thermally cured underlayer for lithographic application

ARCH SPEC CHEM INC12 citations82