Inventor

WAYMAN CHARLES E

US2 patents

⚠️ This page may combine multiple inventors who share the name “WAYMAN CHARLES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US5825482AOct 20, 1998

Surface inspection system with misregistration error correction and adaptive illumination

KLA TENCOR CORP120 citations95

KLA TENCOR TECH CORP

1 patent

US7142315B1Nov 28, 2006

Slit confocal autofocus system

KLA TENCOR TECH CORP24 citations87