Inventor
SCHMIDT STEFAN WOLFGANG
DE15 patents
⚠️ This page may combine multiple inventors who share the name “SCHMIDT STEFAN WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
8 patentsUS11022893B2Jun 1, 2021
Optical assembly with a protective element and optical arrangement therewith
ZEISS CARL SMT GMBH2 citations72
US9632436B2Apr 25, 2017
Optical assembly with suppression of degradation
ZEISS CARL SMT GMBH2 citations72
US9535210B2Jan 3, 2017
Optical hollow waveguide assembly
ZEISS CARL SMT GMBH2 citations72
US10073361B2Sep 11, 2018
EUV lithography system and operating method
ZEISS CARL SMT GMBH5 citations65
US8054446B2Nov 8, 2011
EUV lithography apparatus and method for determining the contamination status of an EUV-reflective optical surface
ZEISS CARL SMT GMBH5 citations61
US10649340B2May 12, 2020
Reflective optical element for EUV lithography
ZEISS CARL SMT GMBH1 citations59
US11307505B2Apr 19, 2022
Method for operating an optical apparatus, and optical apparatus
ZEISS CARL SMT GMBH0 citations50
US10712677B2Jul 14, 2020
Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning
ZEISS CARL SMT GMBH0 citations48
EHM DIRK HEINRICH
2 patentsUS9041905B2May 26, 2015
Optical arrangement, in particular in a projection exposure apparatus for EUV lithography
EHM DIRK HEINRICH4 citations70
US9354529B2May 31, 2016
Arrangement for use in a projection exposure tool for microlithography having a reflective optical element
EHM DIRK HEINRICH1 citations50