Inventor
WIESNER STEFAN
DE12 patents
⚠️ This page may combine multiple inventors who share the name “WIESNER STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS9604299B2Mar 28, 2017
Method and device for connecting an optical element to a frame
ZEISS CARL SMT GMBH2 citations68
US10649340B2May 12, 2020
Reflective optical element for EUV lithography
ZEISS CARL SMT GMBH1 citations59
US10712677B2Jul 14, 2020
Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning
ZEISS CARL SMT GMBH0 citations48