Inventor
RUNSTADLER JR WILLIAM EUGENE
US4 patents
Patents
4 patentsUS10679883B2Jun 9, 2020
Wafer plate and mask arrangement for substrate fabrication
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US10446430B2Oct 15, 2019
Patterned chuck for substrate processing
INTEVAC INC0 citations50
US10559710B2Feb 11, 2020
System of height and alignment rollers for precise alignment of wafers for ion implantation
INTEVAC INC0 citations49
US10418260B2Sep 17, 2019
In line fan out system
INTEVAC INC0 citations37