Inventor
LIAN ZENGDI
CN2 patents
Patents
2 patentsUS12094693B2Sep 17, 2024
Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations50
US11348763B2May 31, 2022
Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations46