Inventor
CHEN XINGJIAN
CN4 patents
Patents
4 patentsUS12261012B2Mar 25, 2025
Plasma treatment apparatus, lower electrode assembly and forming method thereof
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations55
US11371141B2Jun 28, 2022
Plasma process apparatus with low particle contamination and method of operating the same
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations49
US11348763B2May 31, 2022
Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations46
US12123089B2Oct 22, 2024
Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations44