Inventor

LOAN JAMES F

US3 patents

Patents

3 patents

US6296711B1Oct 2, 2001

Film processing system

CVD SYSTEMS INC490 citations96

US6136725AOct 24, 2000

Method for chemical vapor deposition of a material on a substrate

CVD SYSTEMS INC140 citations95

US6663716B2Dec 16, 2003

Film processing system

CVD SYSTEMS INC40 citations90