Inventor

VAN BILSEN FRANCISCUS B

BE3 patents

Patents

3 patents

US6564810B1May 20, 2003

Cleaning of semiconductor processing chambers

ASM AMERICA20 citations89

US6666924B1Dec 23, 2003

Reaction chamber with decreased wall deposition

ASM AMERICA36 citations87

US6708700B2Mar 23, 2004

Cleaning of semiconductor processing chambers

ASM AMERICA6 citations71