Inventor
ZAZZERA LAWRENCE A
US8 patents
Patents
8 patentsUS6310018B1Oct 30, 2001
Fluorinated solvent compositions containing hydrogen fluoride
3M INNOVATIVE PROPERTIES CO89 citations96
US6492309B1Dec 10, 2002
Fluorinated solvent compositions containing hydrogen fluoride
3M INNOVATIVE PROPERTIES CO48 citations95
US6841079B2Jan 11, 2005
Fluorochemical treatment for silicon articles
3M INNOVATIVE PROPERTIES CO31 citations92
US6555510B2Apr 29, 2003
Bis(perfluoroalkanesulfonyl)imides and their salts as surfactants/additives for applications having extreme environments and methods therefor
3M INNOVATIVE PROPERTIES CO25 citations92
US6884338B2Apr 26, 2005
Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor
3M INNOVATIVE PROPERTIES CO26 citations91
US6858124B2Feb 22, 2005
Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor
3M INNOVATIVE PROPERTIES CO34 citations91
US7030067B2Apr 18, 2006
Bis(perfluoroalkanesulfonyl)imides and their salts as surfactants/additives for applications having extreme environments and methods therefor
3M INNOVATIVE PROPERTIES CO6 citations73
US7147767B2Dec 12, 2006
Plating solutions for electrochemical or chemical deposition of copper interconnects and methods therefor
3M INNOVATIVE PROPERTIES CO7 citations72