Inventor
KAJIHARA YUJI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KAJIHARA YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
4 patentsUS9322094B2Apr 26, 2016
Film-forming apparatus
CANON ANELVA CORP4 citations69
US9322095B2Apr 26, 2016
Film-forming apparatus
CANON ANELVA CORP2 citations59
US9607867B2Mar 28, 2017
Substrate processing device and substrate processing method
CANON ANELVA CORP0 citations48
US9109285B2Aug 18, 2015
Film-forming apparatus
CANON ANELVA CORP0 citations38