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Inventor
CORREIA-ANACLETO ANTHONY
FR
2 patents
Patents
2 patents
US8460989B2
Jun 11, 2013
Niobium and vanadium organometallic precursors for thin film deposition
BLASCO NICOLAS
8 citations
79
US9085823B2
Jul 21, 2015
Method of forming a tantalum-containing layer on a substrate
BLASCO NICOLAS
2 citations
58