Inventor
UEFUJI JUMPEI
JP11 patents
Patents
11 patentsUS10923382B2Feb 16, 2021
Electrostatic chuck
TOTO LTD4 citations71
US10373854B2Aug 6, 2019
Electrostatic chuck
TOTO LTD2 citations70
US12543536B2Feb 3, 2026
Electrostatic chuck
TOTO LTD0 citations57
US12374574B2Jul 29, 2025
Electrostatic chuck
TOTO LTD0 citations51
US12341049B2Jun 24, 2025
Electrostatic chuck including a heater element with mutiple heating zones
TOTO LTD0 citations50
US11776836B2Oct 3, 2023
Electrostatic chuck and semiconductor manufacturing apparatus
TOTO LTD0 citations50
US11756820B2Sep 12, 2023
Electrostatic chuck and semiconductor manufacturing apparatus
TOTO LTD0 citations50
US11830755B2Nov 28, 2023
Electrostatic chuck and semiconductor manufacturing apparatus
TOTO LTD0 citations49
US12395101B2Aug 19, 2025
Electrostatic chuck
TOTO LTD0 citations47
US12341050B2Jun 24, 2025
Electrostatic chuck
TOTO LTD0 citations47
US10964579B2Mar 30, 2021
Electrostatic chuck
TOTO LTD0 citations47