Inventor
OZAKI TETSUSHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “OZAKI TETSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS10133265B2Nov 20, 2018
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations71
US9405289B2Aug 2, 2016
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations60
US7615163B2Nov 10, 2009
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD5 citations60