Inventor
VAN OOSTEN ANTON BERNHARD
BE15 patents
Patents
15 patentsUS11079687B2Aug 3, 2021
Process window based on defect probability
ASML NETHERLANDS BV11 citations83
US11150560B2Oct 19, 2021
Projection system and mirror and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10732511B2Aug 4, 2020
Projection system and mirror and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10216093B2Feb 26, 2019
Projection system and minor and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10054862B2Aug 21, 2018
Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method
ASML NETHERLANDS BV3 citations72
US10571812B2Feb 25, 2020
Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations66
US11460782B2Oct 4, 2022
Matching pupil determination
ASML NETHERLANDS BV1 citations61
US11822255B2Nov 21, 2023
Process window based on defect probability
ASML NETHERLANDS BV0 citations60
US11314174B2Apr 26, 2022
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV1 citations60
US11287748B2Mar 29, 2022
Guided patterning device inspection
ASML NETHERLANDS BV0 citations58
US10001710B2Jun 19, 2018
Inspection apparatus, inspection method, lithographic apparatus and manufacturing method
ASML NETHERLANDS BV0 citations51
US12112260B2Oct 8, 2024
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV0 citations50
US10775705B2Sep 15, 2020
Patterning stack optimization
ASML NETHERLANDS BV0 citations49
US11054754B2Jul 6, 2021
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations48
US9798225B2Oct 24, 2017
Method of characterizing, method of forming a model, method of simulating, mask manufacturing method and device manufacturing method
ASML NETHERLANDS BV0 citations30