Inventor
CALKA PAULINE
BE4 patents
Patents
4 patentsUS10410943B2Sep 10, 2019
Method for passivating a surface of a semiconductor and related systems
ASM IP HOLDING BV339 citations98
US9911676B2Mar 6, 2018
System and method for gas-phase passivation of a semiconductor surface
ASM IP HOLDING BV464 citations98
US11532757B2Dec 20, 2022
Deposition of charge trapping layers
ASM IP HOLDING BV2 citations72
US10607895B2Mar 31, 2020
Method for forming a semiconductor device structure comprising a gate fill metal
ASM IP HOLDING BV3 citations72