Inventor

USHIDA TAKURO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “USHIDA TAKURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

2 patents

US11261528B2Mar 1, 2022

Substrate processing apparatus and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP5 citations71

US11967501B2Apr 23, 2024

Substrate processing apparatus and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations60

HITACHI INT ELECTRIC INC

2 patents

US9953830B2Apr 24, 2018

Method of manufacturing semiconductor device, substrate processing apparatus and recording medium

HITACHI INT ELECTRIC INC2 citations71

US9916976B2Mar 13, 2018

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC4 citations71