Inventor

SHIMA SHOHEI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “SHIMA SHOHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

3 patents

US5723367AMar 3, 1998

Wiring forming method

TOSHIBA KK77 citations94

US6552434B2Apr 22, 2003

Semiconductor device and manufacturing method thereof

TOSHIBA KK18 citations92

US6403462B1Jun 11, 2002

Method for manufacturing high reliability interconnection having diffusion barrier layer

TOSHIBA KK16 citations92

EBARA CORP

2 patents

US7262849B2Aug 28, 2007

Method of polishing thin film formed on substrate

EBARA CORP5 citations61

US12101073B2Sep 24, 2024

Method for determining a cleanliness of a cleaning member

EBARA CORP0 citations44

TATEISHI HIDEKI

1 patent

US8205625B2Jun 26, 2012

Apparatus and method for surface treatment of substrate, and substrate processing apparatus and method

TATEISHI HIDEKI0 citations43