Inventor
DOR AMOS
US5 patents
Patents
5 patentsUS6701259B2Mar 2, 2004
Defect source identifier
APPLIED MATERIALS INC82 citations94
US6744266B2Jun 1, 2004
Defect knowledge library
APPLIED MATERIALS INC70 citations92
US6885977B2Apr 26, 2005
System to identify a wafer manufacturing problem and method therefor
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US7401066B2Jul 15, 2008
Correlation of end-of-line data mining with process tool data mining
APPLIED MATERIALS INC25 citations88
US6714884B2Mar 30, 2004
Method and apparatus for providing communication between a defect source identifier and a tool data collection and control system
APPLIED MATERIALS INC7 citations70