Inventor
RADZINSKI MAYA
US3 patents
Patents
3 patentsUS6701259B2Mar 2, 2004
Defect source identifier
APPLIED MATERIALS INC82 citations94
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Defect knowledge library
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US6714884B2Mar 30, 2004
Method and apparatus for providing communication between a defect source identifier and a tool data collection and control system
APPLIED MATERIALS INC7 citations70