Inventor
TENG HUA-KUANG
TW5 patents
Patents
5 patentsUS10717114B2Jul 21, 2020
Cup wash disk with shims
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations67
US10265735B2Apr 23, 2019
Cup wash disk with shims
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US9720325B2Aug 1, 2017
Photoresist coating scheme
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations65
US11097318B2Aug 24, 2021
Cup wash disk with shims
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US9575012B2Feb 21, 2017
Automated wafer inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45