Inventor

RADELAAR SIJBRAND

NL3 patents

Patents

3 patents

US6719499B1Apr 13, 2004

Device for positioning a wafer

ASM INT353 citations95

US6824619B1Nov 30, 2004

Method and device for rotating a wafer

ASM INT13 citations80

US7351293B2Apr 1, 2008

Method and device for rotating a wafer

ASM INT7 citations70