Inventor

KIYOHARA TSUTOMU

US3 patents

⚠️ This page may combine multiple inventors who share the name “KIYOHARA TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US8753449B2Jun 17, 2014

Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film

APPLIED MATERIALS INC9 citations82

US9490116B2Nov 8, 2016

Gate stack materials for semiconductor applications for lithographic overlay improvement

APPLIED MATERIALS INC3 citations70

RAJAGOPALAN NAGARAJAN

1 patent

US8076250B1Dec 13, 2011

PECVD oxide-nitride and oxide-silicon stacks for 3D memory application

RAJAGOPALAN NAGARAJAN488 citations97